In this outstanding book, Professor Richard Leach presents a comprehensive overview of engineering nanometrology and how it is related to micro-/nano-technology and manufacturing.
Professor Richard Leach, who has been with National Physical Laboratory (NPL), UK, since 1990, is one of the leaders in the field of nanometrology over the world. This book is written based on Professor Richard's long experience and solid knowledge in this field. I know his research work well through reading his large number and high quality academic papers, listening to his keynote speeches in international conferences, making face-to-face discussions with him in various occasions. I am always impressed by his depthful insight and wide knowledge in nanometrology. I believe you will feel the same after you have read this book.
This book provides fundamental principles of engineering nanometrology, covering numerous measurement techniques, from static length and displacement to surface topography, mass and force. The principle, design and calibration of surface measuring instruments, including optical systems, scanning probe and particle beam microscopy, are described in depth. The whole book is easy to understand for those even with a limited mathematical knowledge.
This book will be essential and beneficial for researchers, engineers and students who are involved in nanometrology and related engineering areas. Fundamental Principles of Engineering Nanometrology (Micro and Nano Technologies)
This is a superb text on micro- and nano- scale metrology. I am currently completing my PhD in a similar research area and I use this text often as it covers a wide range of techniques, both fundamental and advanced. The diagrams are particularly clear and the mathematics, although advanced, is easy to follow and very useful.
The references are also exhaustive, providing endless further reading on this and related subjects.
I highly recommend this book for anyone who is facing challenges at the micro- and nano- scale. - Nanotechnology'
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